Optical Fiber Heterodyne Interferometer Probe for Measurement of Displacement in Nanometer Order
نویسندگان
چکیده
منابع مشابه
Heterodyne displacement interferometer, insensitive for input polarization.
Periodic nonlinearity (PNL) in displacement interferometers is a systematic error source that limits measurement accuracy. The PNL of coaxial heterodyne interferometers is highly influenced by the polarization state and orientation of the source frequencies. In this Letter, we investigate this error source and discuss two interferometer designs, designed at TU Delft, that showed very low levels...
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The use of optical fibers presents several advantages with respect to free-space optical transport regarding source-frequency delivery to individual heterodyne interferometers. Unfortunately, fiber delivery to individual coaxial heterodyne interferometers leads to an increase of (periodic) nonlinearity in the measurement, because transporting coaxial frequencies through one optical fiber leads ...
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A new heterodyne nano-displacement with error reduction is presented. The main errors affecting the displacement accuracy of the nano-displacement measurement system including intermodulation distortion error, cross-talk error, cross-polarization error and phase detection error are calculated. In the designed system, a He-Ne laser having three-longitudinal-mode is considered as the stabiliz...
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Due to its high resolution and the large measuring range, laser interferometer has been applied widely to the precision industrial measurement and calibration. Fabry-Perot interferometry was often used for the microdisplacement, because of its common optical path structure being insensitive to the environmental disturbances. In the past researches, some kinds of modified Fabry-Perot interferome...
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ژورنال
عنوان ژورنال: Transactions of the Society of Instrument and Control Engineers
سال: 1989
ISSN: 0453-4654
DOI: 10.9746/sicetr1965.25.841